Walter Scott, Jr. College of Engineering

Graduate Exam Abstract

Fernando Brizuela
Ph.D. Preliminary
Feb 06, 2009, 2:30
ERC B301
Table-top Actinic Microscope for Aerial Imaging of EUV Lithography Masks
Abstract: I will report on the demonstration of a laser-based, reflection microscope that operates at 13.2 nm wavelength with a spatial resolution of 55±3 nm. This microscope uses illumination from a table-top EUV laser to acquire aerial images of photolithography masks with a 20 second exposure time. Proof-of-principle measurements will be analyzed and proposed improvements to the system discussed.
Adviser: Carmen Menoni
Co-Adviser: Jorge Rocca
Non-ECE Member: Mario Marconi - ECE
Member 3: Stephen Lundeen - Physics
Addional Members: NA
Program of Study: