Graduate Exam Abstract

Fernando Brizuela

Ph.D. Preliminary

February 6, 2009, 2:30

ERC B301

Table-top Actinic Microscope for Aerial Imaging of EUV Lithography Masks

Abstract: I will report on the demonstration of a laser-based, reflection microscope that operates at 13.2 nm wavelength with a spatial resolution of 55±3 nm. This microscope uses illumination from a table-top EUV laser to acquire aerial images of photolithography masks with a 20 second exposure time. Proof-of-principle measurements will be analyzed and proposed improvements to the system discussed.

Adviser: Carmen Menoni
Co-Adviser: Jorge Rocca
Non-ECE Member: Mario Marconi - ECE
Member 3: Stephen Lundeen - Physics
Addional Members: NA


Program of Study: