{"id":434,"date":"2014-11-06T22:26:18","date_gmt":"2014-11-06T22:26:18","guid":{"rendered":"http:\/\/www.engr.colostate.edu\/me\/facil\/melwp\/?page_id=434"},"modified":"2025-07-16T13:45:00","modified_gmt":"2025-07-16T19:45:00","slug":"fabrication-ards-rtc-bell-jar-sputter-tool","status":"publish","type":"page","link":"https:\/\/www.engr.colostate.edu\/projects\/ngpv\/fabrication-ards-rtc-bell-jar-sputter-tool\/","title":{"rendered":"Fabrication"},"content":{"rendered":"\t\t
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ARDS<\/span>\u00a0(Advanced<\/span> Res<\/span>earch<\/span> Deposition System)<\/span><\/p>

This is a 9 source closed space sublimation tool. It is unique in the fact that all process sequences can be executed in desired time and order without breaking vacuum to fabricate the entire film stack to make\u00a0<\/span>CdTe<\/span>\u00a0based research scale solar cell. Advanced computer control of the system ensures exceptional repeatability in fabrication of test samples.\u00a0<\/span>\u00a0<\/span><\/p>

\"ARDS<\/a>
ARDS for complete CdTe cell Fabrication<\/figcaption><\/figure>

\"\"<\/a><\/p>

Schematic of the Advanced<\/span>\u00a0Research<\/span>\u00a0Deposition System (<\/span>A<\/span>R<\/span>DS<\/span>)<\/span><\/p>

RTC<\/span>\u00a0(Research Test Chamber)<\/span><\/h2>

A cousin to\u00a0<\/span>ARDS<\/span>\u00a0shown above,\u00a0<\/span>RTC<\/span>\u00a0allows co-sublimation of materials that extends our research capabilities beyond single source sublimation.\u00a0<\/span>In its current configuration,\u00a0<\/span>RTC<\/span>\u00a0is used to co-sublimate\u00a0<\/span>CdTe<\/span>\u00a0and Mg to form\u00a0<\/span>CdMgTe<\/span>\u00a0films for Electron Reflector research. A shutter mechanism allows swift switch between\u00a0<\/span>CdTe<\/span>\u00a0and\u00a0<\/span>CdMgTe<\/span>\u00a0during deposition process.<\/span><\/p>

\"RTC<\/a>
RTC for CdMgTe Co-sublimination<\/figcaption><\/figure>

\"\"<\/a><\/p>

Schematic of the\u00a0<\/span>Research Test Chamber (<\/span>RTC<\/span>)<\/span><\/p>

Bell Jar Passivation Tool<\/span><\/h2>

This tool enables passivation study using different materials and\u00a0<\/span>combination of materials while avoiding the issue of material cross contamination using a bell jar that is heated using IR lamps.<\/span><\/p>

\"Bell<\/a>
Bell Jar for Passivation Study<\/figcaption><\/figure>

\"\"<\/a><\/p>

Schematic of Bell Jar Passivation System<\/span><\/p>

Front Contact Sputter Deposition\u00a0<\/span>System<\/span><\/h2>

This system is used for RF sputter deposition. The main focus is front contact materials for\u00a0<\/span>CdTe<\/span>\u00a0cells, including oxides and oxygenated cadmium sulfide. Typically a 4-inch magnetron is operated at 13.56 MHz but DC can be used.\u00a0 A secondary gas flow can be controlled independently via computer, and substrate heating is possible. Upgrades are currently underway to add a load lock, which will lead to integration of high-transparency front contacts into the standard device process<\/span>.<\/span><\/p>

\"Front<\/a>
Front Contact Sputter Deposition<\/figcaption><\/figure>

\u00a0<\/p>

\u00a0<\/p>

RF Sputter\u00a0<\/span>Bell Jar\u00a0<\/span>Deposition<\/span>\u00a0Tool<\/span><\/h2>

This system is similar to the front contact system but is mainly used for ternary absorbers including (<\/span>Cd<\/span>,Zn<\/span>)<\/span>Te<\/span>. Typically a 4-inch magnetron is operated at 13.56 MHz but DC can be used.\u00a0 A secondary gas flow can be controlled independently via computer, and substrate heating is possible. The system is contained independently in a filtered environment.<\/span><\/p>

\"RF<\/a>
RF Sputter Bell Jar for (Cd,Tn) Ze Study.<\/figcaption><\/figure>

\u00a0<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"

ARDS\u00a0(Advanced Research Deposition System) This is a 9 source closed space sublimation tool. It is unique in the fact that all process sequences can be executed in desired time and order without breaking vacuum to fabricate the entire film stack to make\u00a0CdTe\u00a0based research scale solar cell. Advanced computer control of the system ensures exceptional repeatability…Read more <\/a><\/p>\n","protected":false},"author":5,"featured_media":0,"parent":0,"menu_order":7,"comment_status":"closed","ping_status":"open","template":"","meta":{"footnotes":""},"class_list":["post-434","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.engr.colostate.edu\/projects\/ngpv\/wp-json\/wp\/v2\/pages\/434","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.engr.colostate.edu\/projects\/ngpv\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.engr.colostate.edu\/projects\/ngpv\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.engr.colostate.edu\/projects\/ngpv\/wp-json\/wp\/v2\/users\/5"}],"replies":[{"embeddable":true,"href":"https:\/\/www.engr.colostate.edu\/projects\/ngpv\/wp-json\/wp\/v2\/comments?post=434"}],"version-history":[{"count":5,"href":"https:\/\/www.engr.colostate.edu\/projects\/ngpv\/wp-json\/wp\/v2\/pages\/434\/revisions"}],"predecessor-version":[{"id":1404,"href":"https:\/\/www.engr.colostate.edu\/projects\/ngpv\/wp-json\/wp\/v2\/pages\/434\/revisions\/1404"}],"wp:attachment":[{"href":"https:\/\/www.engr.colostate.edu\/projects\/ngpv\/wp-json\/wp\/v2\/media?parent=434"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}