Nanoscale Science and Technology Fabrication
and Characterization Facility

Recent publications describing the capabilities of the Facility

  1. [ref]"Soft x-ray laser holography with wavelength resolution".  Wachulak P.W., M.C. Marconi. R. bartels, C.S. Menoni, J.J. Rocca.  JOSA B. 25, 1811-1814, (2008).
  2. [ref]"Nanopatterning in a compact set up using table top extreme ultraviolet lasers".  P.W. Wachulak, M.G. Capeluto, C.S. Menoni, J.J. Rocca and M.C. Marconi.  Optoelectronic Review 16, 444-450, (2008).
  3. [ref]"Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution".  C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E.H. Anderson, D.T. Attwood, A. V. Vinogradov, I. A. Artyukov, A.G. Ponomareko, V.V. Kondratenko, M.C. Marconi, J.J. Rocca, C.S. Menoni.  Optics Letters, 33, 518, (2008).  This article was also published in Virtual Journal for Biomedical Optics, 3, 4, (2008) and in Virtual Journal of Nanoscale Science & Technology, 17, 15, (2008)
  4. [ref]"Desk-top EUV interferometric lithography tool based on an amplitude division interferometer". P. Wachulak, M. Grisham, D. Martz, S. Heinbuch, W. Rockward, D. Hill, J. Rocca, C.S. Menoni, E. Anderson, M.C. Marconi. JOSA B 25, B104, (2008). This article was also published in The Virtual Journal for Biomedical Optics, 3, 8, (2008)
  5. [ref]"Analysis of extreme ultraviolet microscopy images of patterned nanostructures based on a correlation method". P.W. Wachulak, C.A. Brewer, F. Brizuela, W. Chao, E. Anderson, R. A. Bartels,C.S. Menoni,  J.J. Rocca, M.C. Marconi. Journal of the Optical Society of America B, 25, B20, (2008).
  6. [ref]"High numerical aperture tabletop soft x-ray diffraction microscopy with 70 nm resolution".  R.L. Sandberg, C. Song, P.W. Wachulak, D.A. Raymondson, A. Paul, B. Amirbekian, E. Lee, A. Sakdinawat, C.L. Vorakiat, M.C. Marconi, C.S. Menoni, M.M. Murnane, J.J. Rocca, H.C. Kapteyn, J. Miao.  Proceedings of the National Academy of Science, 105, (1), 24-27, (2008)
  7. [ref]"Nanoscale patterning in high resolution HSQ photoresist by interferometric lithography with table top EUV lasers". P. W. Wachulak, M.G. Capeluto, M. C. Marconi, D. Patel,  C. S. Menoni, J.J. Rocca. Journal of Vacuum Science and Technology B 25 (6), 2094, (2007).
  8. [ref]"Volume extreme ultraviolet holographic imaging with numerical optical sectioning". P. W. Wachulak,  M.C. Marconi, R. A. Bartels, C. S. Menoni, J.J. Rocca. Optics Express 15, 10622-10628, (2007).
  9. [ref]"Patterning of nano-scale arrays by table top extreme ultraviolet laser interferometric lithography". P.W. Wachulak, M.G. Capeluto, M.C. Marconi, C.S. Menoni, J.J. Rocca. Optics Express, 15, 3465, (2007).
  10. [ref]"Table Top Nanopatterning with Extreme Ultraviolet laser Illumination". M.G. Capeluto, P. Wachulak, M.C. Marconi , D. Patel, C.S. Menoni, J.J. Rocca, C. Iemmi, E.H. Anderson, W. Chao, D.T. Attwood. Microelectronics Engineering, 84,  721–724, (2007)
  11. [ref]"Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser". P. W. Wachulak,  R. A. Bartels, M. C. Marconi, C. S. Menoni, J.J. Rocca, Y. Lu, B. Parkinson. Optics Express 14, 9636 (2006).
  12. [ref]"Sub-38 nm resolution table-top microscopy using 13 nm wavelength laser light". G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M.A. Larotonda, B.M. Luther, M.C. Marconi, J.J. Rocca, C.S. Menoni, E.H. Anderson, W. Chao, B.D. Harteneck, J.A. Liddle, Y. Liu, D. T. Attwood. Optics Letters, 31, 1214, (2006)
  13. [ref]"Nanopatterning with interferometric lithography using a compact l= 46.9 nm laser". M. G. Capeluto, G. Vaschenko, M. Grisham, M. C. Marconi, S. Ludueña, L. Pietrasanta, Y. Lu, B. Parkinson, C. S. Menoni, and J. J. Rocca. IEEE Transactions on Nanotechnology, 5, 3 (2006).
  14.  [ref]"Nano-imaging with a compact extreme ultraviolet laser", G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C.S. Menoni, M.C. Marconi, J.J. Rocca, W. Chao, A. Liddle, E. Anderson, D. Attwood, A.V. Vinogradov, I.A. Artioukov, Y.P. Pershyn and V.V. Kondratenko, Optics Letters, 30, 2095, (2005).
  15.  [ref] “Reflection Mode Imaging with Nanoscale Resolution using a Compact Extreme Ultraviolet Laser". F. Brizuela, G. Vaschenko, C, Brewer, M. Grisham, C.S. Menoni, M.C. Marconi, J.J. Rocca, W. Chao, J.A. Liddle, E.H. Anderson, D.T. Attwood, A.V. Vinogradov, I.A. Artiukov, Y.P. Pershing and V.V. Kondratenko. Optics Express 13, 3983-3988, (2005).

Last updated: 10/15/09