Nanoscale Science and Technology Fabrication
and Characterization Facility

Overview

The CSU’s world leadership in the development of Extreme Ultraviolet (EUV) lasers allowed to establish a unique Nanoscale Fabrication and Characterization Specialized Facility (Nano-Facility) based on novel nanoscale resolution patterning, nanomachining and imaging tools that use bright laser beams of wavelengths in the extreme ultraviolet. The facility is based on lasers that operate in longer wavelength edge of the EUV spectrum, 46.9 nm. Testbeads were developed based on these novel EUV lasers to accomplish high resolution imaging, nanopatterning and nano-machining.

Key Technology of CSU Nano-Facility

Instrumentation, expertise and service

How to use the Facility

Recent publications describing the capabilities of the Facility

Contact Information

Mario Marconi. (Mario.Marconi@Colostate.edu) Phone: 970-491-8299, 970-491-8847
Location: Engineering Research center. Foothills Campus. Room B306