Abstract: Laser ablation and ionization
combined with mass spectrometry
(MS) forms the basis of one of the
most widely exploited analytical tools
of the solid state. This work describes
the first demonstration of three
dimensional (3D) molecular
composition imaging with nanoscale
spatial resolution by extreme
ultraviolet (EUV) laser ablation time of
flight (TOF) MS. The essential part of
this instrument is a compact capillary
discharge EUV laser, developed at
Colorado State University, which
emits ~10 uJ nanosecond light pulses
at a wavelength of 46.9 nm. The use
of EUV laser light makes it possible to
ablate craters in polymers with
diameters as small as 120 nm and
depths of 3.5 nm. Both positive and
negative ion extraction modes provide
single shot detection of intact
molecules by probing analyte volumes
down to 50 zL. The EUV TOF MS was
applied to the chemical analysis of
wide range of inorganic and organic
compounds, where nanoscale lateral -
75 nm - and depth - 20 nm –
resolutions were achieved due to the
high sensitivity of the instrument,
without compromising mass
resolution.
Adviser: Carmen Menoni Co-Adviser: N/A Non-ECE Member: Elliot Bernstein, Chemistry Member 3: Jorge Rocca, ECE, Dean Crick, MIP, Diego Krapf, ECE Addional Members: N/A
Publications: I.Kuznetsov et al., Composition Depth Profiling by Soft X-Ray Laser-Ablation Mass
Spectrometry, Proc. of SPIE Vol. 8849 88490G-1, 2013
I.Kuznetsov et al., Volumetric Composition Imaging by Soft X-Ray Laser Ablation Mass Spectrometry, Proc. of ICXRL'14, in press, 2015
I. Kuznetsov et al., Three-dimensional nanoscale molecular imaging by extreme ultraviolet laser ablation mass spectrometry, Nature Communications, in press, 2015
Program of Study: ECE504 ECE506 ECE526 ECE574 ECE650 ECE673 GSTR600 ECE799
