Abstract: Conventional optical microscopes based on the use of visible light routinely
provide the physical and biological sciences with the ability to image samples in a variety of environments with a spatial resolution approaching 200 nm. Extending the capability of these instruments to resolve features with dimensions of a few tens of nanometers, while simultaneously maintaining their compact size, could have a broad impact in nanoscience and nanotechnology.
This thesis describes the development and characterization of a full?field microscope, the EUVM-2, which combines 13.2/13.9 nm wavelength illumination from a high brightness tabletop extreme ultraviolet laser with state?of?the?art diffractive zone plate optics to capture full?field images with 38 nm spatial resolution in exposure times of ~20 seconds. The EUVM-2, entirely built at Colorado State University, operates in transmission mode. Images of selected grating patterns were acquired and used to assess the resolution capabilities of the microscope.
The results open a clear path to the realization of very high resolution (e.g. 10?20 nm) tabletop analytical imaging tools capable of imaging objects in a variety of environments with little or no sample preparation. In addition, the high peak brightness and short duration of the EUV laser pulses opens up the possibility of acquiring images
of samples undergoing rapid changes with picosecond temporal resolution, potentially including the study of non?repetitive phenomena through single shot imaging. Operating at a wavelength near 13.5 nm, that selected by the microelectronic industry to print the future generations of integrated circuits, the EUVM2 offers a platform for the demonstration of a lithography mask inspection tool.
Adviser: Dr. Carmen S. Menoni Co-Adviser: N/A Non-ECE Member: Dr. Carl E. Patton, Physics Member 3: Dr. Jorge J. Rocca, ECE and Physics Addional Members: N/A
