Defense Presentation

Fernando Brizuela

Ph.D. Preliminary
February 06, 2009, 2:30
ERC B301

Abstract:  I will report on the demonstration of a laser-based, reflection microscope that operates at 13.2 nm wavelength with a spatial resolution of 55±3 nm. This microscope uses illumination from a table-top EUV laser to acquire aerial images of photolithography masks with a 20 second exposure time. Proof-of-principle measurements will be analyzed and proposed improvements to the system discussed.

Adviser: Carmen Menoni
Co-adviser: Jorge Rocca
Non-ECE member: Mario Marconi - ECE
Member3: Stephen Lundeen - Physics
Member4: David Attwood
Additional member: NA

Publications to be Reviewed:
1. "Mask inspection microscopy with 13.2 nm table-top laser illumination," F. Brizuela, Y. Wang, C. Brewer, F. Pedaci, W. Chao, E.H. Anderson, Y. Liu, K.A. Goldberg, P. Naulleau, P.W. Wachulak, M.C. Marconi, D.T. Attwood, J.J. Rocca, C.S. Menoni, Optics Letters 34, Issue 3, pp. 271-273 (2009). 2. "Analysis of extreme ultraviolet microscopy images of patterned nanostructures based on a correlation method," P.W. Wachulak, C.A. Brewer, F. Brizuela, C.S. Menoni, W. Chao, E.H. Anderson, R.A. Bartels, J.J. Rocca, M.C. Marconi, JOSA B 25, Issue 7 pp. B20-B26 (2008). 3. "Warm photoionized plasmas created by soft-x-ray laser irradiation of solid targets," M. Berrill, F. Brizuela, B. Langdon, H. Bravo, C.S. Menoni, J.J. Rocca, JOSA B 25, Issue 7, pp. B32-B38 (2008). 4. "Single-Shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution," C.A. Brewer, F. Brizuela, P. Wachulak, D.H. Martz, W. Chao, E.H. Anderson, D.T. Attwood, A.V. Vinogradov, I.A. Artyukov, A.G. Ponomareko, V.V. Kondratenko, M.C. Marconi, J.J. Rocca, C.S. Menoni, Optics Letters 33, Issue 5, pp.518-520 (2008). 5. "Sub-38 nm resolution table-top microscopy using 13 nm wavelength laser light," G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M.A. Larotonda, B.M. Luther, M.C. Marconi, J.J. Rocca, C.S. Menoni, E.H. Anderson, W. Chao, B.D. Harteneck, J.A. Liddle, Y. Liu, D.T. Attwood, Optics Letters 31, 1214-1216 (2006). 6. "Anodically grown films on copper and copper-nickel alloys in slightly alkaline solutions," F. Brizuela, R. Procaccini, S. Cere, M. Vazquez., Journal of Applied Electrochemistry 36, Issue 5, pp. 583-590 (2006). 7. "Nano-imaging with a compact extreme ultraviolet laser," G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C.S. Menoni, M. Marconi, J.J. Rocca, W. Chao, A. Liddle, E. Anderson, D. Attwood, A.V. Vinogradov, I.A. Artioukov, Y.P. Pershyn and V.V. Kondratenko, Optics Letters 30, 2095 (2005). (This article has been selected for publication in the Virtual Journal of Nanoscale Science & Technology 2005.) 8. "Reflection mode microscope using a compact extreme ultraviolet laser light source," F. Brizuela, G. Vaschenko, C. Brewer, M. Grisham, C.S. Menoni, M. Marconi, and J.J. Rocca, W. Chao, A. Liddle, E. Anderson, and D. Attwood, A.V. Vinogradov and I.A. Artioukov, Y.P. Pershyn and V.V. Kondratenko, Optics Express 13, 3983-3989, (2005). 9. "Characteristics of a Saturated 18.9 nm Tabletop Laser Operating at 5 Hz Repetition Rate," M. A


Program of Study:
C 563A-001 Group Theory C 563B-001 Vibrational Spectroscopy C 563C-001 Electronic Structure & Magnetism C 563D-001 Magnetic Spectroscopies ECE 795-001 Independent Study EE 404-001 Experiments-Optical Electroncs EE 441-001 Optical Electronics EE 546-001 Laser Fundamentals & Devices EE 580-001 Ultrafast Optics EE 580-001 Physical Optics EE 777-001 X-Ray Lasers ME 567-001 Broad-Beam Ion Sources PH 451-001 Introductry Quantum Mechancs I PH 452-001 Introductry Quantum Mechncs II PH 571-001 Math Methods for Physics I GSTR 500 Grad Transfer Credits Univ of California-Berkeley