EUV Lazer Components by Brian Lyumes
Project Description New compact EUV light sources have become of great importance in recent years, such as the need for shorter wavelengths used in the lithography processes to manufacture seminconductors. Much of the research in this field is being done by CSU students and faculty at the Center for Extreme Ultraviolet Sciences and Technology. I am working on building many of the components that make up a complete EUV laser system that will be used for cutting edge research in future projects. Accompishments In the previous semester I designed some optic mounts, manufactured a steel plate to link optical tables, designed and built a cooling system for a Ti:Sapphire crystal, and helped build several vacuum chambers. This semester I have finished all but one of the vacuum chambers that will be used in several laser systems. I also have been testing the chambers for leaks.
Goals I will finish the remaining vacuum chamber and test it for leaks. Once all the chambers have proven reliable they can be assembled into a complete system. Team Members I am the only member of this project, but have recieved much help and direction from my "supervisor/mentor" Dale Martz, and senior advisor Jorge Rocca. I would also like to thank the many other people at the lab who have given me guidence throughout the year. Final Report